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Eon™ Film Thickness Monitor, the new era
in thin film deposition has arrived !
The world is changing to one where networks can connect
everything. Why not your film thickness monitor? To achieve
this goal, others have developed simple, modified
oscillators that attach to the crystal feed through and
supply digital data to a personal computer. The Eon™ takes a
much different approach and offers a unit that is superior
to even the best stand alone crystal monitors. The
ground-breaking Eon™ does everything a standard film
thickness monitor can and more:
- real-time temperature measurement,
- heater control,
- real time frequency vs temperature correction, and
crystal resistance.
By adding temperature control capability, the software
can correct for crystal heating via a pre-loaded frequency
vs. temperature curve, ensuring the ultimate in film
thickness accuracy. Combined with the RC™ cut, a major
contributor to erratic crystal performance, crystal stress,
is eliminated. This leads to the highest accuracy, most
stable, and longest life thin film thickness sensor ever
created.
Real time crystal resistance measurement puts the Eon™ in a
class by itself. Instead of displaying a derived and often
meaningless measurement of the crystal “health”, we monitor
the current that drives the crystal during oscillation. As
this current decreases, the potential for crystal failure
increases, but in a non linear fashion. Since failure is
specific to materials and coating conditions, the Eon™
allows users to create their own predictive algorithms for
crystal lifetime and crystal change out.
Easily adapted to your deposition control system, the
software is LabView™ based and open for modification. No
proprietary and awkward software here! We want your process
to be seamless and trouble free, not an exercise in fitting
a square peg into a round hole!
Features
• World’s first real-time frequency vs. temperature
correction capability
• Temperature measuring and controlling crystal oscillator
capable of driving a single crystal sensor
• PID emulated programmable temperature control
• Shutter on/off support
• Heater status indicator on unit and in software
• Compatible with our 500ºC Tempe™ and Oasis™ temperature
controlled crystal sensors
• Communicates with user designed or customized LabView™
software
• Infinitely expandable system: hundreds of Eons™ can be
networked
• All connecting cables, software and instruction manual
included
Specifications
• Drives crystals from 1-10 MHz, 1 to 200Ω, any type
(Quartz, SuperQuartz)
• One type K grounded thermocouple input; accurate to
+/-0.25°C
• One sensor head input, accurate to +/-1Hz
• One 24 volt 4A DC heater output
• Operates off PC cable power without heater, 24 volt power
with heater (supplied)
• Industry standard RS232 communication protocol
• 4.5” X 2.5” X 1.5
Why you need to control for temperature
Thin Film Deposition Monitor
