The Quartz Monitor 160 is a unique film thickness measuring device
that utilizes either 6 MHZ or 5MHz quartz crystals. The economical
compact half rack unit includes 2 independent measuring channels
with an optional card for 4 additional channels. The channels can be
assigned to different films and different sensors can be averaged to
provide a more uniform reading of your deposition process. Inquire
about other models we market!
User Friendly
The user interface of the Quartz Monitor 160 is done through a
single line alphanumeric display a numeric entry display and a
spinner knob. Parameters are arranged in groups of menus with those
that are frequently changed most easily accessible. Seldom changed
system parameters are buried deeper. Nine different parameter sets
can be stored.
Windows Software
The Quartz Monitor 160 can be connected to a PC through the RS-232
communications port and the provided software. The software can
graph the rate of the individual sensor channels average rate
reading and save the data to a file in Microsoft Excel spreadsheet
format. Parameters can be loaded and stored to your PC making
setting up experiments easier.
Accessories
A 4 sensor input card for averaging different sensors to provide a
more uniform reading of your deposition process. An analog output
card with 2 outputs allowing rate and thickness analog information
to be provided for records or deposition control. A temperature
compensated oscillator providing about 25 times more stability than
the standard oscillator. This option is used for low deposition
rates where the sensor crystal can be held at a stable temperature.
Specifications
sensor
inputs
2 standard, or 6 optional
recorder outputs
2
frequency range
4.0 to 6.0 MHz
stored
films
9
frequency accuracy
0.002% @ 6 MHz
digital inputs
open shutter, close
shutter, zero thickness, zero time
frequency resolution
0.06 Hz @ 6 MHz
relay
outputs
shutter, thickness
setpoint, time setpoint, crystal fail
rate
resolution
0.055 Å/sec
size
88.5 x 212.7 x 196.9 mm
3.5 x 8.4 x 7.75 inches
thickness resolution
0.027 Å @ 2 readings/sec
and 2.7 g/cc density
power
90-140/180-240 VAC 50/60 Hz
Ordering Information
Model 160
2-Channel Thin Film
Rate/Thickness Monitor
XTR502-020
4-Channel Option Card (expands Mod
160 to 6 QCM input channels)
A complete system consists of a monitor,
feedthrough, sensor, and sensor kit. A sensor kit
contains a standard oscillator, a 10-pack of crystals,
and the cables required to connect everything
together. An example of a basic typical system might
include the following:
Model 160
2-Channel Thin Film Rate/Thickness
Monitor
XTR930-000
Feedthrough, 1 inch bolt, one
electrical and two cooling lines 3/16"
XTR932-000
Single standard sensor, with 1/8"
cooling lines
XTR934-003
Sensor kit, includes one XTR900-010
oscillator, one XQI-8010G pkg of 10 gold crystals, one
XTR902-011 6inch (150mm) BNC cable, one XTR902-012 10ft
(3m) BNC cable, and one 902-014 30" (0.7m) vacuum cable.
