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Residual Gas Analyzer
New Generation MicropoleTM
RGA has arrived !
The Micropole™ Residual Gas Analyzer is one of
the smallest complete mass spectrometer systems available. The
compact size is achieved by the patented design of miniature
array of quadrupole mass filters. The array offers similar or
greater sensitivity than conventional mass spectrometers but in
a fraction of the volume. The system is capable of operating at
much higher pressures than traditional systems, so the need for
additional differential pumping equipment is reduced.
The sensors are factory pre-tuned and calibrated
against transfer standards which allows direct
interchangeability of the sensor by the user without the need
for technical expertise to calibrate.
click images for more!
It is possible to take data without a PC when
you use the Monitor Controller with 3.5” LCD. Up to eight
Micropole systems can be networked and controlled using RS-485
or Ethernet communication.
size and lightweight
1/20th size when compared to
conventional residual gas analyzers makes it easy to integrate
to your system.
Mini array of 9 quadrupoles gives excellent
sensitivity at a fraction of the volume of traditional
High pressure operation
Can be used at up to 0.9Pa (7mTorr, 9 x 10-3mbar)
so in many applications in many application the need for
expensive vacuum pumping is reduced or eliminated.
Interchangeable Sensor Head in
The sensor heads are pre-tuned and calibrated
prior to shipment allowing the user to make sensor changes in
the field without the need for fine tuning or technical
Up to eight sensors can be monitored by a
single PC using RS-485. The systems can also be monitored
remotely over Ethernet.
User friendly software
Micropole Scanner™ software allows the user
to monitor partial pressures of gases in various modes e.g.
trend graph, analog graph, leak mode, bar graph, 3D…
The optional Monitor Controller can be used
on the chamber mounted directly on the Spectrum Generator,
allowing the user to monitor the vacuum chamber without the need
for a PC.
As an integral part of the vacuum
equipment, the Micropole™qualifies tools for process and provides real time
control of vacuum processes. By increasing tool uptime and
reducing scrap products the Micropole™helps improve productivity in manufacturing
facilities. Typical applications of the Micropole™mass spectrometer RGA : Semiconductor Wafer
Fabrication - Physical Vapor Deposition - Magnetic/Optical
Storage Media - Industrial Vacuum Processes - Vacuum Research
and Development - Glass/Optical Coating - Particle Accelerators.
The Micropole™can double up as an on board helium leak detector and
by using extra quadrupole heads can be used on other vacuum
systems in the vicinity without breaking vacuum on the
chambers it is mounted to. It is an economical way to have a
leak detector capability that can be shared among several
(This chart belongs to the old generation Micropole!
The new generation currently is available only for 65amu
Micropole Analyzer (MPA)*
Maximum Operating Pressure N2
Minimum Detectable Partial Pressure for Slow Scan
WinMPA (Microsoft Windows XP,
2000, ME, NT4.0, 95/98)
* Micropole Analyzer has two types (MPA / SMPA). SMPA is
protected by a mesh, on the vacuum fitting, designed to extend
the lifetime of the sensor in harsh environments such as plasma
processes. ** Chose electron energy, 70eV or 43eV through PC *** AMU: Atomic Mass Unit