
	eNewsTronix Semiconductor & Surface Science Applications

Dear Valued Customer,

We recently added a new application note on our web; "Growth of Si nanowires on micropillars for the study of their dopant distribution by atom probe tomography"
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May I also invite you to view our blog where a new article has been posted on the "Inhomogeneity of a highly efficient InGaN based blue LED studied by 3D atom probe tomography".

The InGaN based multiple quantum well (MQW) structure in a commercially available white light emitting diode (LED) was studied by transmission electron microscopy (TEM) and three-dimensional atom probe tomography (APT). The average In mole fraction by three-dimensional (3D) APT was found to be about 18% in the InGaN well which is consistent with the secondary ion mass spectrometry (SIMS) analysis.

The In distribution in the InGaN well layer was analyzed by the iso curve mapping of 3D APT and found to be nonuniform in the InGaN active layer. In clustering or In rich regions in the range of 2?3 nm size were found, in contrast to recent reports. Our results thus indicate that In clustering is essential for high-brightness InGaN based LEDs. We have also observed a discontinuity in the range of 50?100.

Group III-nitride semiconductors have been recognized as very important materials for opto-electronic devices such as light emitting diodes (LEDs) and laser diodes (LDs) for applications in the visible and ultra-violet (UV) regions. To produce highly efficient light emission in LEDs, it is important to realize pure and almost perfect semiconductor materials in epitaxial growth. In most LED materials, it is desirable to have dislocation densities.....

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Gas Concentration Monitor, IR-150

HORIBA has used its gas analysis technology and cleaning process experience to develop a new gas concentration monitor. HORIBA has honed its knowledge over many years through the development and production of chemical solution concentration monitors such as those used for SC-1 and SC-2 monitors, mass flow controllers, and a variety of fluid supply systems. The gas concentration monitor completes HORIBA's process control lineup, making it possible for the company to offer total process solutions that meet all our customers needs.

Product Features

Inline installation for real-time measurement.

Compact space-saving design allowing for easy integration.

Suitable for monitoring concentration in a variety of cleaning equipment, and drying processes.

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The FG-100A Series gas analyzer can is carried and installed in small spaces for efficient analytical performance

The FG-100A series of FTIR gas analyzers enables the detection and measurement of a wide variety of substances, such as PFCs, greenhouse gases and semiconductor / flat panel display (FPD) process gases. Legislation / guidelines encourages industry to act to reduce these substances due to their contribution to global warming. To provide effective on-site gas measurement, HORIBA has developed compact single cell and dual cell models, their portability makes for easy transportation, along with its ease of set up, making them suitable for a diverse range of gas measurement applications.

The FG-100A Series is available as a total system, including software, ideal for semiconductor / FPD process gas analysis, an extensive library, and a portable sampling unit. With expertise in environmental gas analysis built up over a period of 50 years, HORIBA technology provides gas-monitoring support for your semiconductor and FPD processes.

Product Features

Data sampling possible down to intervals of 0.6 seconds*
"Speed Priority Mode" can be selected at the time of measurement to perform data sampling at a cycle of less than one second. This is effective for recipes that are completed in a short time and for precise verification of the behavior of exhaust gas when conditions are changed.
*Depending on measurement conditions.
Compact and ease of use makes it ideal for those environments where space is a premium.
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==>> For Semiconductor 'WET PROCESS' monitoring and control instrumentation, please download attached brochure (see footer area).