The VES-210 is a 'customizable' production
vacuum exhaust station consisting of 2x10 vacuum evacuation and
gas backfill ports; 10 in each heated zone. The ports can be
batch pumped (so either 10 or 20 ports can be pumped
simultaneously) yet can be isolated individually by toggle
valves.
The design can be used for production of
gas-backfilled devices typically as used in X-ray collection
techniques such as X-ray Fluorescence / Diffraction products, or
in the manufacture of appendage ion pumps, small communication
oscillation devices or other pinch-off cavities.
High vacuum is achieved by a turbo-molecular
pump. The vacuum cycle is fully automated via a miniature
programmable logic controller (PLC). Vacuum and gas hardware is
stainless steel throughout and the vacuum hardware is mostly
right out of our own 90-page vacuum components catalog. The
system conforms to CE norms.
To compensate for barometric pressure shifts,
a high-precision absolute pressure sensor is used. The sensors
for rough and high vacuum are a broad-range
xtronix thoria-coated
iridium filament Bayard-Alpert and two thermocouple gauge heads.
