High stability Mass Flow Module - Gas flow control is
unaffected by upstream and downstream pressure fluctuations. Differential Pressure CRITERION
D200 series
The CRITERION D200 series is a pressure insensitive, wide
range, high precision mass flow device. Stable flow rate
control is guaranteed even with upstream and downstream
pressure fluctuations. The advanced technology allows a turn
down ration of 333:1 which means the user can control flows
from 0.3% to full scale allowing a reduction in the number
of gas lines.
Typical multi chamber gas lines have a line
regulator, pressure sensor and filter to avoid mass flow
controller crosstalk phenomenon caused by pressure
fluctuations. The CRITERION D200 series capabilities
eliminate the requirement of these components hence reduces
the total cost and size of the gas cabinet.
Compact gas panel with wide range flow rate control
Features
Latest cutting-edge differential pressure detection
available first in the market.
Compact gas line -wide range compact gas panel. (No
need for pressure sensor, regulator and filter.)
Control flow rate from low to high. (Wide range)
High accuracy from 3D mapping.
Improve process yield - supply the standard flow
rate to semiconductor process.
Wide Range Ability
Control wide range flow rate more than 300 times turn
down capability.
Gas panel flow diagram
The new types of mass flow controller, SEC-Z700 series and
CRITERION D200 series exhibit high stability and control the
gas flow without effect of upstream and downstream pressure
fluctuations. They not only give a flow rate output but also
the temperature and pressure readings. Control interface is
by analog, RS-485 and DeviceNet™ communication. Suitable for
the high performance, compact and weight saving of the gas
line.
